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Draft:Steady-state microbunching

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  • Comment: This is a lightly reworded version of an originally LLM-generated draft; merely rewording LLM-generated text usually does not resolve the problem of LLM usage. Please remove all text (while keeping the review template) and start over without LLMs. For general advice, see Help:Your first article. Helpful Raccoon (talk) 07:52, 24 September 2026 (UTC)

Steady-state microbunching (SSMB) is a proposed approach to create synchrotron radiation light with both high brightness and coherence.[1]

accelerator-based Synchrotron light source architecture designed to generate high-average-power, continuous-wave (CW) Extreme ultraviolet (EUV) light. To overcome the temporal incoherence of conventional storage ring and the low duty cycles of pulsed linear Free-electron laser (FEL), SSMB synthesizes the strengths of both systems to achieve highly coherent radiation at megahertz repetition rates. It achieves this by utilizing an external high-power laser modulator and magnetic elements to organize a continuously circulating electron beam into regularly spaced, longitudinal microbunches at optical or EUV wavelengths. This externally maintained, periodic structure allows the electrons' electromagnetic fields to add coherently as they pass through an undulator.[2][3] The primary application for SSMB is multi-kilowatt, 13.5 nm wavelength demands of next-generation high-numerical-aperture (High-NA) semiconductor lithography for sub-3 nm logic nodes. SSMB can achieve average powers exceeding 1 kW, which aims to bypass the physical scaling limitations and theoretical ~500 W ceiling of current laser-produced plasma (LPP) sources. First theorized in 2010 and successfully demonstrated at the Metrology Light Source (MLS) in Berlin in 2021, the technology is now being scaled toward kilowatt-class viability, notably through a Tsinghua University-led prototype facility under construction in Xiong'an New Area, Hebei, China.[3][4]

References

[edit]
  1. ↑ Hemsing, Erik; Stupakov, Gennady; Xiang, Dao; Zholents, Alexander (July 14, 2014). "Beam by design: Laser manipulation of electrons in modern accelerators". Reviews of Modern Physics. 86 (3): 897–941. doi:10.1103/RevModPhys.86.897. ISSN 0034-6861.
  2. ↑ Ratner, Daniel F.; Chao, Alexander W. (2010). "Steady-State Microbunching in a Storage Ring for Generating Coherent Radiation". Physical Review Letters. 105 (15) 154801. Bibcode:2010PhRvL.105o4801R. doi:10.1103/PhysRevLett.105.154801. PMID 21230912.
  3. 1 2 Deng, Xiujie; et al. (2021). "Experimental demonstration of the mechanism of steady-state microbunching". Nature. 590 (7847): 576–579. Bibcode:2021Natur.590..576D. doi:10.1038/s41586-021-03203-0. PMID 33627811.
  4. ↑ Kruschinski, Arnold; et al. (2024). "Confirming the theoretical foundation of steady-state microbunching". Communications Physics. 7 (1) 160. Bibcode:2024CmPhy...7..160K. doi:10.1038/s42005-024-01657-y.