Microactuator

A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:

Large travel
High precision
Fast switching
Low power consumption
Power free force sustainability

For microactuator, there are two in addition

Microstructurability
Integrability

Principle of microactuators

The basic principle can be described as the expression for mechanical work
$W={\overrightarrow {F}}\cdot \Delta {\overrightarrow {r}}$
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

Classes of microactuators

Sources:^[1]^[2]^[3]^[4]

References

↑ Fujita, Hiroyuki; Toshiyoshi, Hiroshi (1998). "Micro actuators and their applications". Microelectronics Journal. 29 (9): 637–640. doi:10.1016/S0026-2692(98)00027-5.
↑ Wood, D.; Burdess, J. S.; Harris, A. J. (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110): 7/1–7/3. doi:10.1049/ic:19960698.
↑ Ma, Z. C.; Fan, J.; Wang, H.; Chen, W.; Yang, G. Z.; Han, B. (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small. 19 (22). doi:10.1002/smll.202300469. PMID 36855777.
↑ Yoshida, K.; Park, J. H.; Yano, H.; Yokota, S.; Yun, S. (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid" (PDF). Sensors and Materials. 17 (3): 97–112.

[1] Fujita, Hiroyuki; Toshiyoshi, Hiroshi (1998). "Micro actuators and their applications". Microelectronics Journal. 29 (9): 637–640. doi:10.1016/S0026-2692(98)00027-5.

[2] Wood, D.; Burdess, J. S.; Harris, A. J. (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110): 7/1–7/3. doi:10.1049/ic:19960698.

[3] Ma, Z. C.; Fan, J.; Wang, H.; Chen, W.; Yang, G. Z.; Han, B. (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small. 19 (22). doi:10.1002/smll.202300469. PMID 36855777.

[4] Yoshida, K.; Park, J. H.; Yano, H.; Yokota, S.; Yun, S. (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid" (PDF). Sensors and Materials. 17 (3): 97–112.

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Microactuator

Principle of microactuators

Classes of microactuators

See also

References