130 nm process

The 130 nanometer (130 nm) process is a level of semiconductor process technology that was reached in the 2000–2001 timeframe by such leading semiconductor companies as Intel, Texas Instruments, IBM, and TSMC.

The origin of the 130 nm value is historical, as it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by the International Technology Roadmap for Semiconductors (ITRS).

Some of the first CPUs manufactured with this process include Intel Tualatin family of Pentium III processors.

In 2020, American semiconductor company SkyWater Technology, in conjunction with Google and eFabless, released their 130 nm process design kit as open-source under the Apache License.^[1] This was the first ever open-source PDK.^[2]

Processors using 130 nm manufacturing technology

Preceded by 180 nm	CMOS manufacturing processes	Succeeded by 90 nm

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Semiconductor device fabrication

MOSFET scaling (process nodes)
20 μm – 1968 10 μm – 1971 6 μm – 1974 3 μm – 1977 1.5 μm – 1981 1 μm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 90 nm – 2003 65 nm – 2005 45 nm – 2007 32 nm – 2009 28 nm – 2010 22 nm – 2012 14 nm – 2014 10 nm – 2016 7 nm – 2018 5 nm – 2020 3 nm – 2022 2 nm – 2025
Future 1 nm ~ 2027
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